Heat treatment of cathodic arc deposited amorphous hard carbon films
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چکیده
منابع مشابه
Heat treatment of tetrahedral amorphous carbon films grown by filtered cathodic vacuum-arc technique
Tetrahedral amorphous carbon (ta-C ) is a potential low-cost substitute for diamond in certain applications, but little is known of the temperature range over which its desirable properties are retained. The thermal stability of tetrahedral amorphous carbon (ta-C ) films has been investigated by heat treatment of the films at temperatures from room temperature to 450°C in high vacuum, low vacuu...
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Nitrogen-doped tetrahedral amorphous carbon (ta-C :N) films were deposited by filtered cathodic vacuum arc (FCVA) technique using nitrogen as a background gas. The structure of the ta-C :N films was studied with X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy in terms of nitrogen flow rate used during the film deposition. Potential windows of the films measured in deaerated and un...
متن کاملThe effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc
The mechanical properties of both undoped and nitrogen containing tetrahedral amorphous carbon (ta-C and ta-C:N ) films, such as hardness and E-modulus, are investigated. The mechanical properties are related to the film structures. The ta-C and ta-C:N films are prepared in a filtered cathodic vacuum arc process. Nanoindentation testing is used to measure the mechanical properties of these film...
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The macroparticle content of titanium films deposited using a steered vacuum cathodic arc has been investigated. It has been found that the macroparticle number decreases with increasing steering magnetic field strength, and experimental results are found to be consistent with the model in which the number and mass of macroparticles arising from a cathode spot are proportional to the cathode sp...
متن کاملProperties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 1997
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00385-4